Photo Aci Generator (WPAG Series)

We can offer WPAGs for KrF or ArF- excimer resist. Wako is developing various diazodisulfones and triphenylsulfonium salts as follows.
Diphenyliodonium salts is a useful WPI series as photo cationic initiators. Wako provides supply products of varied grades from high grade to multipurpose grade. We aiso provide servises of custom manufacturing of PAGs.

WPAG-145 Bis(cyclohexylsulfonyl)diazomethane

yellow crystal mp. 130°C UV absorption~300nm

WPAG-170 Bis(t-butylsulfonyl)diazomethane

yellow crystal mp. 121°C UV absorption~270nm

WPAG-199 Bis(p-toluenesulfonyl)diazomethane

white-pale yellow crystal mp. 120°C UV absorption~320nm

WPAG-281 Triphenylsulfonium trifluoromethanesulfonate

white crystal mp. 132°C UV absorption~300nm

WPAG-336 Diphenyl-4-methylphenylsulfonium trifluoromethanesulfonate

white crystal mp. 101°C UV absorption~310nm

WPAG-367 Diphenyl-2,4,6-trimethyphenylsulfonium p-toluenesulfonate

white crystal mp. 112°C UV absorption~310nm

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