×

This website uses cookies. By using the site you are agreeing to our Privacy Policy.

Photo Aci Generator (WPAG Series)


Photo Aci Generator (WPAG Series)

We can offer WPAGs for KrF or ArF- excimer resist. Wako is developing various diazodisulfones and triphenylsulfonium salts as follows.
Diphenyliodonium salts is a useful WPI series as photo cationic initiators. Wako provides supply products of varied grades from high grade to multipurpose grade. We aiso provide servises of custom manufacturing of PAGs.

WPAG-145 Bis(cyclohexylsulfonyl)diazomethane

  • yellow crystal
  • mp. 130°C
  • UV absorption~300nm

WPAG-170 Bis(t-butylsulfonyl)diazomethane

  • yellow crystal
  • mp. 121°C
  • UV absorption~270nm

WPAG-199 Bis(p-toluenesulfonyl)diazomethane

  • white-pale yellow crystal
  • mp. 120°C
  • UV absorption~320nm

WPAG-281 Triphenylsulfonium trifluoromethanesulfonate

  • white crystal
  • mp. 132°C
  • UV absorption~300nm

WPAG-336 Diphenyl-4-methylphenylsulfonium trifluoromethanesulfonate

  • white crystal
  • mp. 101°C
  • UV absorption~310nm

WPAG-367 Diphenyl-2,4,6-trimethyphenylsulfonium p-toluenesulfonate

WPAG-367

  • white crystal
  • mp. 112°C
  • UV absorption~310nm