Photo Aci Generator (WPAG Series)


Photo Aci Generator (WPAG Series)

We can offer WPAGs for KrF or ArF- excimer resist. Wako is developing various diazodisulfones and triphenylsulfonium salts as follows.
Diphenyliodonium salts is a useful WPI series as photo cationic initiators. Wako provides supply products of varied grades from high grade to multipurpose grade. We aiso provide servises of custom manufacturing of PAGs.

WPAG-145 Bis(cyclohexylsulfonyl)diazomethane

  • yellow crystal
  • mp. 130°C
  • UV absorption~300nm

WPAG-170 Bis(t-butylsulfonyl)diazomethane

  • yellow crystal
  • mp. 121°C
  • UV absorption~270nm

WPAG-199 Bis(p-toluenesulfonyl)diazomethane

  • white-pale yellow crystal
  • mp. 120°C
  • UV absorption~320nm

WPAG-281 Triphenylsulfonium trifluoromethanesulfonate

  • white crystal
  • mp. 132°C
  • UV absorption~300nm

WPAG-336 Diphenyl-4-methylphenylsulfonium trifluoromethanesulfonate

  • white crystal
  • mp. 101°C
  • UV absorption~310nm

WPAG-367 Diphenyl-2,4,6-trimethyphenylsulfonium p-toluenesulfonate

WPAG-367

  • white crystal
  • mp. 112°C
  • UV absorption~310nm